16455676

Paragraph Number

57

The method also includes coupling the second side of the semiconductor wafer to the first side of the optically transmissive substrate. Referring to FIG. 7, the semiconductor wafer 36 is illustrated coupled to the optically transmissive lid 24. As illustrated, the inner bumps are coupled to the optically transmissive lid 24 on either side of the scribe line. Referring to FIG. 8, an enlargement of area A in FIG. 7 is illustrated. In FIG. 8, the interconnection of the inner bump 46 with the first RDL 32 is illustrated. The inner bump 46 provides the mechanical and electrical coupling between the die pad 44 and the first RDL 32. As illustrated in this particular implementation, the inner bump includes two metal layers. In this implementations, the inner bump includes a copper pillar 48 with a solder tip 50. In various implementations, the die pad pitch may be about 70 microns. In other implementations, the inner bump may include only one metallic material such as a solder. In some implementations, the die pad pitch may be about 60 microns. The size of the pad pitch in semiconductor packages formed using the method described herein is smaller than semiconductor packages using TSVs which can have a pad pitch larger than 200 microns.

Added by DJM 3 2021