Term #952
nickel monosilicide chemical mechanical polishing process
Claim Term
nickel monosilicide chemical mechanical polishing process
Origin matter
—
Reference Case 1
FSP1813
Date Added
4/30/20
Created
4/30/20, 4:42 AM
Modified
4/30/20, 4:42 AM
Full Desc
"Nickel monosilicide chemical mechanical polishing process" refers to a chemical mechanical polishing process adapted for removal and or polishing of layers of nickel monosilicide.