Term #951
residual silicon layer
Claim Term
residual silicon layer
Origin matter
—
Reference Case 1
FSP1813
Date Added
4/30/20
Created
4/30/20, 4:42 AM
Modified
4/30/20, 4:42 AM
Full Desc
"Residual silicon layer" refers to an amount of silicon film, remaining after a selective material removal process and/or a silicidation process.