Term #943
sacrificial layer
Claim Term
sacrificial layer
Origin matter
—
Reference Case 1
FSP1813
Date Added
4/30/20
Created
4/30/20, 4:42 AM
Modified
4/30/20, 4:42 AM
Full Desc
"Sacrificial layer" refers to a layer of material, typically a thin film, used in microfabrication to temporarily create one or more structures for certain steps of a microfabrication process. In certain embodiments, the sacrificial layer is temporary because once the microfabrication process completes the sacrificial layer has been removed or rendered inactive with respect to structures and/or devices formed in in a microfabrication process.