Term #941
exposed top silicon layer
Claim Term
exposed top silicon layer
Origin matter
—
Reference Case 1
FSP1813
Date Added
4/30/20
Created
4/30/20, 4:42 AM
Modified
4/30/20, 4:42 AM
Full Desc
"Exposed top silicon layer" refers to a top silicon layer that has been covered or coated in a prior process step or is currently covered or coated and is subsequently exposed by one or more of etching, selective material removal process, chemical mechanical polishing process, a mechanical polishing process, and/or the like.