Term #939
thickness
Claim Term
thickness
Origin matter
—
Reference Case 1
FSP1813
Date Added
4/30/20
Created
4/30/20, 4:42 AM
Modified
4/30/20, 4:42 AM
Full Desc
"Thickness" refers to a dimension for a structure (e.g. Integrated Circuit Semiconductor (ICS)), material layer, and/or thin film formed by way of a microfabrication process. As used herein, thickness refers to a measurement from a bottom of an ISC or thin film to a top of the ISC or thin film where the bottom and top run parallel to an X-axis of an X-Y coordinate axis and the thickness is measured parallel to the Y-axis.