Term #936
deposition
Claim Term
deposition
Origin matter
—
Reference Case 1
FSP1813
Date Added
4/30/20
Created
4/30/20, 4:42 AM
Modified
4/30/20, 4:42 AM
Full Desc
"Deposition" refers to a phase transition in which gas transforms into solid without passing through the liquid phase. Deposition is a thermodynamic process. The reverse of deposition is sublimation and hence sometimes deposition is called desublimation. (Search "deposition" on Wikipedia.com March 3, 2020. Accessed April 3, 2020.) Deposition is one of many processes that may be used in microfabrication of an integrated semiconductor device or structure. Principles and mechanics of deposition are used in the manufacture or generation of thin film layers and/or structures and are referred to as thin film deposition.