Term #930
microfabrication
Claim Term
microfabrication
Origin matter
—
Reference Case 1
FSP1813
Date Added
4/30/20
Created
4/30/20, 4:42 AM
Modified
4/30/20, 4:42 AM
Full Desc
"Microfabrication" refers to the process of fabricating miniature structures of micrometer scales and smaller. Microfabrication processes may be used for integrated circuit fabrication, also known as "semiconductor manufacturing," "semiconductor processing," "semiconductor process integration," or "semiconductor device fabrication".A variety of processes for depositing, forming, growing, micro-forming, or adding structures and/or thin films of material to a substrate (e.g., additive material fabrication) and/or patterning, lithography, removing, etching, or dissolving of structures, and/or thin films of material from a substrate (e.g., selective material removal). Examples of such processes include, but are not limited to, deposition, etching, lithography, and the like.In the last two decades, microelectromechanical systems (MEMS), microsystems (European usage), micromachines (Japanese terminology) and their subfields, microfluidics/lab-on-a-chip, optical MEMS (also called MOEMS), RF MEMS, PowerMEMS, BioMEMS and their extension into nanoscale (for example NEMS, for nano electro mechanical systems) have re-used, adapted or extended microfabrication methods. (Search "microfabrication" on Wikipedia.com Jan. 11, 2020. Edited, Accessed April 3, 2020.)