Term #1,317
via
Claim Term
via
Origin matter
—
Reference Case 1
FSP1843
Date Added
7/16/20
Created
7/16/20, 2:35 PM
Modified
7/16/20, 2:35 PM
Full Desc
"Via" refers to a conductive structure configured to electrically connect a conductor on one level of a multilayer metal stack to another conductor on another level of the multilayer metal stack. Vias may be made of a variety of conductive materials. Often vias are made from tungsten and may be referred to as ‘plugs’ or ‘contact plugs.'