2469

Application Electrical Interconnection of Image Sensor package
Matter Number ONSO3305US - Onsemi346 Reference Case 1 ONSO3305US - Onsemi346
Created 3/3/21, 12:00 AM Modified 3/3/21, 12:00 AM
Application Number

16455676

Paragraph Number

5

Content

Semiconductor packages sometimes have through silicon vias (TSVs) to provide electrical interconnection between front side metal pads and backside outer terminals of an image sensor package. Formation of TSVs includes silicon and dielectric etch, isolation lithography, as well as temperature changes during the processing steps.

Notes

Added by DJM 3 2021